Dr. Chen’s research interests are MEMS/NEMS (micro/nano-electro-mechanical-systems), micro/nano fabrication, sensors and actuators, nanocomposites for MEMS, micro scale materials characterization (strength and tribology), microfluidic systems for biological MEMS devices, and molecular dynamics simulation (micro/nano/atomic multi lever characterization and design).

MEMS/NEMS has been recognized as the next generation of technology after computer science. Dr. Chen is very active in this hot field. The following are details regarding his research:
•  Micro/nano fabrication of silicon and non-silicon materials (metal, polymer and ceramic). Micro/nano structures (2D and 3D, monolithic and hybrid) can be fabricated by various pattern transfer methods (wet and dry etching, chemical and physical deposition), molding (LIGA_Like), etc.
•  Sensors including gas sensor (gas emission including NOx, SOx, Cox, H2S), high temperature gas sensors (>1000C), pressure sensor and biosensors, etc.
•  Actuators using smart (active) materials (PZT, PMN, SMA, EAP, etc.) combine with micro/nano components to produce large force and large displacement to meet specific needs.
•  Nanocomposites for MEMS devices (sensors and actuators)
•  Micro scale mechanical characterization: Scaling issues on strength and durability of material and structures; micro scale friction, wear and lubrication for MEMS devices.
•  Microfluidic systems for Bio-MEMS (biosensors)

Selected Publications

Bo Li, Quanfang Chen, et al, “Development of Robust Microvalves for Large Flow Rate Robust Hydraulic actuators”, IEEE The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS-03, Kyoto, Japan, January 19-23, 2003, 96-99.

Jianwei Gong, Quanfang Chen, Sudipta Seal, “Development of Micromachined Nanocrystalline Mesoporous SnO2 Gas Sensor for Electronic Nose”, IEEE Sensors 2003, Toronto, Canada, October 22-24, 2003, to appear.

Lung-hsi (Longo) Chu, Quanfang Chen and Greg P. Carman, “Strength Predictions for Interlocking Microridges Fabricated with Different Geometries”, J. Miceoelectromechanical Systems, vol. 10, June 2001, pp310.

Quanfang Chen, Da-Jeng Yao, C-J Kim, and Greg P. Carman, “Investigation the Influence of Fabrication Process and Crystal Orientation on Shear Strength of Silicon Microcomponents”, Journal of Materials Science, 35 (21):5465-5474, November 2000.

Quanfang Chen and Greg Carman, “Microscale Tribology (friction) Measurement and Influence of Crystal Orientation and Fabrication Process”, Proceedings of Thirteenth IEEE Conference on Micro Electro Mechanical Systems (MEMS-2000), January 23-27, 2000, Miyazaki, Japan, pp. 657.