Advanced Microfabrication Facility (AMF)
Advanced Microfabrication Facility |
Engineering 1, Rooms 124 & 163 Orlando, FL 32816
Phone: 407-882-1500 or 407-823-3584 or 407-823-4517
(Click here for map to AMF – on UCF campus)
The Advanced Microfabrication Facility (AMF) is a multi-user
cleanroom facility dedicated to provide university researchers
and industrial and government partners the capabilities
to perform cutting edge research, and training and education
of students in the use of the available equipment for fabrication
and testing of microdevices. AMF consists if a 600 sq.
ft. class 100 facility and a 2500 sq. ft. class 1000 facility.
The AMF is supported by a research associate, a graduate student assistant, and a facilities coordinator to assist all users in use of and training on the AMF equipment. Collaboration of UCF researchers with other universities, government agencies, and industrial companies is strongly encouraged.
AVAILABLE EQUIPMENT/TECHNIQUES
Lithographic Processing |
|
| Δ Pattern Generator Δ EVG 620 Dual sided mask aligner Δ AutoGlow Plasma Asher Δ LFE Barrel Asher |
Δ Nanonex NEX2500 Nano-Imprinter Δ Quintel Mask Aligner Δ Tamarak Contact Printer Δ MJB -3 Mask Aligners |
Thin Film Processing |
|
| Δ AJA Six-Gun Sputtering System Δ AJA Three-Gun Sputtering System Δ AJA 2-Gun, 10 Pocket E-Beam System with Ion-Assist Source Δ CHA E-Beam Evaporation |
Δ EVG 510 Wafer Bonder Δ Plasma Technology - RIE Δ Edwards Filament Evaporator Δ Cryo Filament Evaporation Δ Cryo Small Single Sputtering |
Characterization |
|
| Δ J.A. Woollam Spectral Ellipsometer Δ Rudolph Ellipsometer Δ Signatone 8" Four Point Probe Δ Magnetron Four Point Probe Δ Keithley CF System Δ HP 4145B Transistor Analyzer Δ HP 4192LF Impedance Analyzer Δ DC Probe Station Δ Tektronix Curve Tracers |
Δ VEECO-Interferometric Profiler Δ Alpha Step Profilometer Δ Nikon Measurement Microscope Δ Nikon Inspection Microscope Δ Micro-Positioner Δ Micropositioner - 6 Axis |
General Lab Equipment |
|
| Δ Mini-Brute 4" Phosphorus
and Boron Diffusion furnaces Δ Exhaust hoods, wet processing benches, including RCA-1 & 2 cleans, TMAH silicon etch, and chemical metal etching. |
Δ Isotemp Programmable Furnace Δ Mini-Brute 4" wet and dry silicon oxidation Furnaces |
HOW TO USE THE FACILITY
All work performed at AMF requires a work
order form. CONTACT INFORMATION
Please Acknowledge Us
|
The AMF is located on the first floor of
the Engineering-I building. Closest public parking is
in Garage C. For other map information and directions to
the campus, go to http://campusmap.ucf.edu/flash/index.php
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