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Advanced Materials Processing and Analysis Center

Advanced Microfabrication Facility

Engineering 1, Rooms 124 & 163    Orlando, FL 32816
Phone: 407-882-1500 or 407-823-3584 or 407-823-2414

(Click here for directions to AMF.)

The Advanced Microfabrication Facility (AMF) is dedicated to providing researchers and industrial partners the capabilities to perform cutting edge research and training and educating students in the successful use of the available instruments. AMF consists if a 600 sq. ft. class 100 facility and a 2500 sq. ft. class 1000 facility.

The AMF is supported by a research engineer and a facilities coordinator to assist faculty, students and members of the industrial community. Collaboration with other universities, government agencies and industries is encouraged.


AVAILABLE EQUIPMENT/TECHNIQUES

GL - General Lab Equipment

Δ Ammonia Oven
Δ Dicing Diamond Saw
Δ Florod Laser Zapper

 Δ Isotemp Programmable Furnace
Δ Mini-Brute 4" Furnaces
Δ Strasbaugh CMP

PR - Photoresist Processing

Δ LFE Barrell Asher
Δ MJB -3 Mask Aligner I
Δ MJB -3 Mask Aligner II

 Δ PR Processing Equipment
Δ Quintel Mask Aligner
Δ Tamarak Contact Printer

TF - Thin Films

Δ AJA Six-Gun Sputtering System
Δ AJA Three-Gun Sputtering System
Δ CHA E-Beam Evaporation
Δ Cryo Filament Evaporation
Δ Cryo Small Single Sputtering

 Δ Edwards #2 Multi-Filament Evaporator
Δ Edwards Diffusion Filament Evaporator
Δ Plasma Technology - PECVD
Δ Plasma Technology - RIE

CE - Characterization Equipment

Δ Alpha Step Profilometer
Δ Amray 1700 SEM - Cleanroom
Δ DC Probe Station
Δ Elipsometer
Δ HP 4145B Transistor Parameter Analyzer
Δ HP 4192LF Impedance Analyzer
Δ Keithley CF System
Δ Magnetron Four Point Probe

 Δ Micro-Positioner
Δ Micropositioner - 6 Axis
Δ Nikon Distance Meas. Micros. w/4" Travel
Δ Nikon Inspection Microscope
Δ Signatone 8" Four Point Probe
Δ Tektronix Curve Tracers
Δ VEECO-Interfermetric Profiler
Δ Wentworth RF Probe Station


HOW TO USE THE FACILITY

All work performed at AMF requires a work order form.
UCF users will need to submit a completed work order form signed by their advisor.
Other University/Industrial users will need to provide a Purchase Order made to UCF/AMPAC.
Completed work order forms and Purchase Orders may be submitted via email to
ampacmcf@mail.ucf.edu, or faxed to (407) 882-1502


Click here for Work Order Form


CONTACT INFORMATION

  Dr. Donald C. Malocha
Professor and Director
(407) 823-2414
dcm@ece.cecs.ucf.edu
   Mr. Kevin Casey
Research Engineer
(407) 823-3584
kcasey@mail.ucf.edu
   Ms. Waheeda Illasarie
Facility Coordinator
(407) 882-1500
willasar@mail.ucf.edu
Please Acknowledge Us

Any publications or presentations resulting from data obtained or
samples prepared by the AMF engineer/faculty should acknowledge
the assistance of the engineer/faculty member and/or center as:

"Advanced Microfabrication Facility
AMPAC
University of Central Florida"

Please provide a reprint of any publication in which the AMF and its engineer/faculty is acknowledged.

Thank You





Advanced Materials Processing and Analysis Center
Engineering Building 1, Room 381
Box 162455     Orlando, FL 32816-2455
(407) 882-1455     Fax: (407) 882-1462
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